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Industry Focus

Semiconductor and Data Centers

Ultra-pure water, precision cooling, and environmental monitoring for cleanroom and data center operations.

Applications

How we serve semiconductor and data centers

UPW Distribution
Ultra-pure water (UPW) flow measurement for semiconductor fab rinse and etch processes. Materials and surface finishes selected for sub-ppb contamination control.
Precision Cooling Loops
Chilled water and glycol flow monitoring for server rack cooling and CRAC/CRAH units. High-accuracy instruments ensure thermal load balancing across zones.
Process Gas Metering
Specialty gas flow measurement for CVD, PVD, and etch tool delivery systems. Instruments rated for corrosive and toxic process gases.
Recommended Products

Featured instruments for semiconductor and data centers

FAM541Metal Tube Rotameter

Variable area meter with 316Ti wetted parts for corrosive gas and UPW compatibility.

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FAM544Purge Meter

Compact purge rotameter for nitrogen and process gas blanket monitoring.

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EJA110EDP Transmitter

Yokogawa high-stability transmitter for precision cooling loop DP.

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